Author： Koyatsu Y. Miki H. Watanabe F.
Publisher： Elsevier
ISSN： 0042-207X
Source： Vacuum, Vol.47, Iss.6, 1996-06, pp. : 709-711
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
Related content
Extended abstract: Does the outgassing rate of UHV chambers depend on pumping speed?
By Jousten K.
Vacuum, Vol. 47, Iss. 4, 1996-04 ,pp. :
Access to resources
Recommend
Effects of re-adsorption on outgassing rate measurements
By Redhead P.A.
Vacuum, Vol. 47, Iss. 4, 1996-04 ,pp. :
Ion-induced desorption yield measurements from copper and aluminium
By Lozano M.P.
Vacuum, Vol. 67, Iss. 3, 2002-09 ,pp. :
Measurements of partial outgassing rates
By Schindler N. Schleussner D. Edelmann C.
Vacuum, Vol. 47, Iss. 4, 1996-04 ,pp. :
By Son J.-H. Park M.-Y. Rhee S.-W.
Thin Solid Films, Vol. 335, Iss. 1, 1998-11 ,pp. :