On the effect of bakeout for the pumping speed dependence of outgassing rate in a stainless steel chamber

Author: Akaishi K.   Kubota Y.   Motojima O.   Mushiaki M.   Funato Y.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.47, Iss.6, 1996-06, pp. : 741-744

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Abstract