Depth profile analysis of porous Si film by ERDA using a E-E detector telescope

Author： Avasthi D.K.   Subramaniyam E.T.   Hui S.K.   Mehta B.R.  

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.47, Iss.9, 1996-09, pp. : 1061-1064

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