Magnetron facing target sputtering system for fabricating single-crystal films

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Effect of deposition conditions and substrate position on the properties of superconducting YBa 2 Cu 3 O thin films prepared in a facing-target sputtering system

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A multiple target system using laser ablation for multilayer deposition

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Structure and electrical properties of ITO thin films deposited at high rate by facing target sputtering

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Characterization of lead zirconate titanate thin films deposited at low temperature by reactive facing target sputtering

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