Temporization of a scanning ion gun for the in-depth measurement of the erosion rate compatible with SIMS data acquisition: A recursive method

Author： Serrano J.J.   Blanco J.M.   Aguilar M.   Ameziane O.  

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.48, Iss.7, 1997-09, pp. : 643-645

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