Tone control in dry development of photosensitive polyimides

Author: Munoz J.   Dominguez C.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.49, Iss.1, 1998-01, pp. : 35-41

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract