The influence of substrate temperature on the properties of Al, Zr and W coatings deposited by closed-field unbalanced magnetron sputtering

Author： Kelly P.J.   Arnell R.D.  

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.49, Iss.1, 1998-01, pp. : 43-47

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