Thin polyimide layers-preparation and properties

Author: Assa J.   Spassova A.E.   Karamancheva A.I.   Dimitrova A.T.   Rangelov C.N.   Danev G.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.51, Iss.2, 1998-10, pp. : 185-188

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Abstract