Author: Gesheva K.A. Gogova D.S. Beshkov G.D. Popov V.
Publisher: Elsevier
ISSN: 0042-207X
Source: Vacuum, Vol.51, Iss.2, 1998-10, pp. : 181-184
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
Related content
Thin CNx films prepared by vacuum rapid thermal annealing
By Beshkov G. Dimitrov D.B. Georgiev S. Petrov P. Zambov L. Ivanov B. Popov C. Georgiev M.
Vacuum, Vol. 51, Iss. 2, 1998-10 ,pp. :
Preparation of SiO 2 thin films using the Cat-CVD method
By Saito K. Uchiyama Y. Abe K.
Thin Solid Films, Vol. 430, Iss. 1, 2003-04 ,pp. :