High crystalline quality titanium disilicides formed by sputter deposition of Ti&unknown;Si multilayers and annealing

Author: Revva P.   Kastanas A.   Travlos A.   Nassiopoulou A.G.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.51, Iss.3, 1998-11, pp. : 335-337

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Abstract