Improvement of thickness distribution and crystallinity of ZnO thin films prepared by radio frequency planer magnetron sputtering

Author: Takeuchi M.   Inoue K.   Yoshino Y.   Ohwada K.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.51, Iss.4, 1998-12, pp. : 565-569

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Abstract