Effect of an interfacial layer on adhesion strength deterioration between a copper thin film and polyimide substrates

Author: Iwamori S.   Miyashita T.   Fukuda S.   Nozaki S.   Sudoh K.   Fukuda N.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.51, Iss.4, 1998-12, pp. : 615-618

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Abstract