Ultra-thin silicon-oxide films by sputter-deposition and their application to high-quality poly-Si TFTS

Author: Serikawa T.   Shirai S.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.51, Iss.4, 1998-12, pp. : 781-783

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract