Effects of CH 4 addition to Ar-O 2 discharge gases on resistivity and structure of ITO coatings

Author： Kusano E. Kashiwagi N. Kobayashi T. Nanto H. Kondo I. Kinbara A.

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.51, Iss.4, 1998-12, pp. : 785-789

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