Plasma assisted chemical vapour deposition of boron nitride coatings from using BCl 3 -N 2 -H 2 -Ar gas mixture

Author： Rossi F.   Schaffnit C.   Thomas L.   del Puppo H.   Hugon R.  

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.52, Iss.1, 1999-01, pp. : 169-181

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