Characterisation of r.f. sputtered Fe-Cr-oxide films

Author: Stenberg T.   Keranen J.   Vuoristo P.   Mantyla T.   Virtanen S.   Schmuki P.   Buchler M.   Bohni H.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.52, Iss.4, 1999-04, pp. : 477-483

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Abstract