Carbon nitride films synthesized by electron beam evaporation of carbon and nitrogen ion bombardment

Author： Petrov P. Dimitrov D. Beshkov G. Krastev V. Nemska S. Georgiev C.

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.52, Iss.4, 1999-04, pp. : 501-504

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