Accurate electrical measurements for in situ diagnosis of RF discharges in plasma CVD processes

Author： Viera G.   Costa J.   Compte F.J.   Garca-Sanz E.   Andujar J.L.   Bertran E.  

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.53, Iss.1, 1999-05, pp. : 1-5

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