Characterization of an inductively amplified magnetron plasma by glow discharge mass spectrometry

Author: Molle C.   Beauvois A.   Wautelet M.   Dauchot J.P.   Hecq M.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.53, Iss.1, 1999-05, pp. : 17-20

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Abstract