Ion energy distribution in ionized dc sputtering measured by an energy-resolved mass spectrometer

Author： Kusano E.   Kobayashi T.   Kashiwagi N.   Saitoh T.   Saiki S.   Nanto H.   Kinbara A.  

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.53, Iss.1, 1999-05, pp. : 21-24

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