Ion fraction and energy distribution of Ti flux incident to substrate surface in RF-plasma enhanced magnetron sputtering

Author： Fukushima K. Kusano E. Kikuchi N. Saito T. Saiki S. Nanto H. Kinbara A.

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.59, Iss.2, 2000-11, pp. : 586-593

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