Surface cleaning efficiency measurements for UHV applications

Author: Benvenuti C.   Canil G.   Chiggiato P.   Collin P.   Cosso R.   Guerin J.   Ilie S.   Latorre D.   Neil K.S.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.53, Iss.1, 1999-05, pp. : 317-320

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Abstract