Experiment on removing hydrocarbon by using RF oxygen or hydrogen plasma

Author： Tada S.   Sakamoto Y.   Suzuki T.   Saito H.   Oikawa M.   Kidokoro A.   Enoki H.  

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.53, Iss.1, 1999-05, pp. : 321-324

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