Design, plasma studies, and ion assisted thin film growth in an unbalanced dual target magnetron sputtering system with a solenoid coil

Author： Engstrom C.   Berlind T.   Birch J.   Hultman L.   Ivanov I.P.   Kirkpatrick S.R.   Rohde S.  

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.56, Iss.2, 2000-02, pp. : 107-113

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