Development of electromagnetic acceleration plasma generator for titanium nitride coatings

Author: Shibata T.   Tahara H.   Yasui T.   Kagaya Y.   Yoshikawa T.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.59, Iss.1, 2000-10, pp. : 203-209

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Abstract