C x F y polymer film deposition in DC and RF fluorinert vapor plasmas

Author： Lungu C.P. Lungu A.M. Sakai Y. Sugawara H. Tabata M. Akazawa M. Miyamoto M.

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.59, Iss.1, 2000-10, pp. : 210-219

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