Properties of high-density (Pb, La) (Zr, Ti) O 3 ceramics for sputtering targets

Author: Hidaka K.   Hashiguchi S.   Nagayama S.   Kim P.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.59, Iss.2, 2000-11, pp. : 451-458

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Abstract