Author: Seki H. Kitazawa S. Ueno Y. Wada N. Takemori S. Sato T. Uchikawa S. Setoyama E.
Publisher: Elsevier
ISSN: 0042-207X
Source: Vacuum, Vol.59, Iss.2, 2000-11, pp. : 445-450
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
Related content
Development of a large-area transformer coupled plasma source
By Kim H.J. Han K.H. Yoon N.S. Hwang Y.S.
Thin Solid Films, Vol. 341, Iss. 1, 1999-03 ,pp. :
Recent results of multi-cathode electron beam plasma source
By Kim T.Y. Noh S.J. Jing J.K. Lee K.O. Chung K.H.
Thin Solid Films, Vol. 345, Iss. 1, 1999-05 ,pp. :