Development of a locally electron-heated plasma source

Author: Seki H.   Kitazawa S.   Ueno Y.   Wada N.   Takemori S.   Sato T.   Uchikawa S.   Setoyama E.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.59, Iss.2, 2000-11, pp. : 445-450

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Abstract