Surface nitridation processes and non-linear behaviour of the reactive magnetron discharge with titanium target

Author： Luca D.   Denier van der Gon A.W.   Anita V.   Ponjee M.W.G.   Brongersma H.H.   Popa G.  

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.61, Iss.2, 2001-05, pp. : 163-167

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