Sputtered yttrium oxide thin films appropriate for electrochemical sensors

Author： Ivanic R.   Rehacek V.   Novotny I.   Breternitz V.   Spiess L.   Knedlik C.   Tvarozek V.  

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.61, Iss.2, 2001-05, pp. : 229-234

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