Non-linearity of diffusion in amorphous Si-Ge multilayers

Author: Csik A.   Beke D.L.   Langer G.A.   Erdelyi Z.   Daroczi L.   Kapta K.   Kis-Varga M.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.61, Iss.2, 2001-05, pp. : 297-301

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Abstract