Using of the high-grade layered structures for the demonstration of the depth resolution of the RBS method

Author： Kobzev A.P.   Kravtcov E.A.   Romashev L.N.   Semerikov A.V.   Ustinov V.V.  

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.63, Iss.4, 2001-08, pp. : 501-505

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