In situ investigation of phase transitions of implanted silicon at powerful light irradiation

Author: Fattakhov Y.V.   Galyautdinov M.F.   L'vova T.N.   Khaibullin I.B.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.63, Iss.4, 2001-08, pp. : 649-655

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Abstract