Preparation of TiO 2 films by CVD method and its electrical, structural and optical properties

Author： Bessergenev V.G. Khmelinskii I.V. Pereira R.J.F. Krisuk V.V. Turgambaeva A.E. Igumenov I.K.

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.64, Iss.3, 2002-01, pp. : 275-279

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