Preparation of poly-Si films by Cat-CVD for thin film transistor

By Sunayama H.   Yamada K.   Karasawa M.   Ishibashi K.  

Thin Solid Films, Vol. 430, Iss. 1, 2003-04 ,pp. : 226-229

Elsevier

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Fabrication of a-Si 1-x C x :H thin films for solar cells by the Cat-CVD method using a carbon catalyzer

By Sugita K.   Itoh M.   Masuda A.   Matsumura H.  

Thin Solid Films, Vol. 430, Iss. 1, 2003-04 ,pp. : 170-173

Elsevier

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Preparation of B-doped a-Si 1-x C x :H films and heterojunction p-i-n solar cells by the Cat-CVD method

By Chikusa K.   Takemoto K.   Itoh T.   Yoshida N.   Nonomura S.  

Thin Solid Films, Vol. 430, Iss. 1, 2003-04 ,pp. : 245-248

Elsevier

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Synthesis of SiO 2 and SiO x C y H z thin films by microwave plasma CVD

By Barranco A.   Cotrino J.   Yubero F.   Espinos J.P.   Bentez J.   Clerc C.   Gonzalez-Elipe A.R.  

Thin Solid Films, Vol. 401, Iss. 1, 2001-12 ,pp. : 150-158

Elsevier

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Characterization of Cat-CVD grown Si-C and Si-C-O dielectric films for ULSI applications

By Takatsuji K.   Kawakami M.   Makita Y.   Murakami K.   Nakayama H.   Miura Y.   Shimoyama N.   Machida H.  

Thin Solid Films, Vol. 430, Iss. 1, 2003-04 ,pp. : 116-119

Elsevier

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