Argon temperature and density versus the input power in a high pressure planar magnetron discharge

Author： Escrivao M.L. Pereira P.J.S. Ferreira J.L. Teixeira M.R. Maneira M.J.P.

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.64, Iss.3, 2002-01, pp. : 367-371

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