Development of a data acquisition and control system for thin film deposition equipment and its application to metals-MBE

Author： Martn P.P.   Alonso C.E.   Domingo I.   Ruiz A.  

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.64, Iss.3, 2002-01, pp. : 373-379

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