Monte Carlo simulation of ion transport process in ECR microwave plasma with negative bias

Author： Ye G.   Jinyuan L.   Yuanhong S.   Xiaojun W.   Xinlu D.   Tengcai M.  

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.65, Iss.3, 2002-05, pp. : 353-359

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