Author: Levchenko I.G. Keidar M.
Publisher: Elsevier
ISSN: 0042-207X
Source: Vacuum, Vol.66, Iss.1, 2002-06, pp. : 77-85
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
Related content
Surface roughening during ion-assisted film deposition
By Carter G.
Thin Solid Films, Vol. 322, Iss. 1, 1998-06 ,pp. :
The effects of fluorine ion implantation on the formation of SIMOX structure
Thin Solid Films, Vol. 298, Iss. 1, 1997-04 ,pp. :
Change of Surface Structure upon Foam Film Formation
CHEMPHYSCHEM, Vol. 16, Iss. 4, 2015-03 ,pp. :