Sputtering of metals by heavy ions in the inelastic energy loss range

Author: Cheblukov Y.N.   Didyk A.Y.   Halil A.   Semina V.K.   Stepanov A.E.   Suvorov A.L.   Vasiliev N.A.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.66, Iss.2, 2002-07, pp. : 133-136

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Abstract