Synthesis and mechanical properties of BCN coatings deposited by PECVD

Author： Kurapov D.   Neuschutz D.   Cremer R.   Pedersen T.   Wuttig M.   Dietrich D.   Marx G.   Schneider J.M.  

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.68, Iss.4, 2002-12, pp. : 335-339

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