Patterning of a micromechanical coplanar waveguide using a dry etching technique

Author： Hasck S.   Mozolova Z.   Lalinsky T.   Tomaska M.   Kostic I.  

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.69, Iss.1, 2002-12, pp. : 283-287

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract

Related content

The characteristics of the dipole espar antenna using the cross‐coplanar waveguide feed

By  

MICROWAVE AND OPTICAL TECHNOLOGY LETTERS, Vol. 57, Iss. 10, 2015-10 ,pp. : 2238-2242

John Wiley & Sons Inc

Access to resources Recommend Favorite

Dry patterning of copper films using an O 2 plasma and hexafluoroacetylacetone

By Lee W.   Yang H.-J.   Reucroft P.J.   Soh H.-S.   Kim J.-H.   Woo S.-L.   Lee J.  

Thin Solid Films, Vol. 392, Iss. 1, 2001-07 ,pp. : 122-127

Elsevier

Access to resources Recommend Favorite

Composite right/left-handed coplanar waveguide band-pass filter using capacitively-coupled zeroth-order resonators

By Li C.  

Applied Physics A, Vol. 87, Iss. 2, 2007-05 ,pp. : 317-319

Springer Publishing Company

Access to resources Recommend Favorite

Effective Dielectric Permittivity of Coplanar Waveguide Type Microwave Phase Shifter Using Ferroelectric Liquid Crystal

By Moritake H.  

Molecular Crystals and Liquid Crystals, Vol. 542, Iss. 1, 2011-01 ,pp. : 158-166

Taylor & Francis Ltd

Access to resources Recommend Favorite

Design of coplanar-waveguide-based elliptic filter using T-shaped defected ground structure

By Moyra Tamasi  

Waves in Random and Complex Media, Vol. 23, Iss. 2, 2013-05 ,pp. : 143-151

Taylor & Francis Ltd

Access to resources Recommend Favorite