

Author: Beshkov G. Lei S. Lazarova V. Nedev N. Georgiev S.S.
Publisher: Elsevier
ISSN: 0042-207X
Source: Vacuum, Vol.69, Iss.1, 2002-12, pp. : 301-305
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
Related content




Moisture-resistant properties of SiN x films prepared by PECVD
By Lin H. Xu L. Chen X. Wang X. Sheng M. Stubhan F. Merkel K.-H. Wilde J.
Thin Solid Films, Vol. 333, Iss. 1, 1998-11 ,pp. :



