Comparative study of electron beam-gas interaction in an SEM operating at pressures up to 300Pa

Author： Kadoun A.   Belkorissat R.   Khelifa B.   Mathieu C.  

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.69, Iss.4, 2003-01, pp. : 537-543

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