Mechanisms of forming the Cr-N composite in the unsteady-state stage of ion beam-assisted deposition process

Author: Bendikov V.I.   Guglya A.G.   Marchenko I.G.   Malykhin D.G.   Neklyudov I.M.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.70, Iss.2, 2003-03, pp. : 331-337

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Abstract