Ion implantation induced surface morphology changes in thin As 3 Se 2 films

Author: Tsvetkova T.   Balabanov S.   Skordeva E.   Kitova S.   Sielanko J.   Maczka D.   Zuk J.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.70, Iss.2, 2003-03, pp. : 471-475

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Abstract