Carbon nitride thin films formation by N 2 + ion implantation

Author: Palacio C.   Diaz D.   Gomez-Aleixandre C.   Garcia M.M.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.48, Iss.7, 1997-09, pp. : 709-713

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Abstract