Determination of the height of a microstructure sample by a SEM with a conventional and a digital photogrammetric method

Author： Schubert M.   Gleichmann A.   Hemmleb M.   Albertz J.   Kohler J.M.  

Publisher： Elsevier

ISSN： 0304-3991

Source： Ultramicroscopy, Vol.63, Iss.1, 1996-04, pp. : 57-64

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