Infrared spectroscopic ellipsometry-a new tool for characterization of semiconductor heterostructures

Author： Kasic A.   Schubert M.   Einfeldt S.   Hommel D.  

Publisher： Elsevier

ISSN： 0924-2031

Source： Vibrational Spectroscopy, Vol.29, Iss.1, 2002-07, pp. : 121-124

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