Au-Catalyzed Silicon Nanoneedles Synthesized from Pure Silane Gas at Various RF Powers on Silicon Substrate by VHF-PECVD

Author: Hamidinezhad Habib  

Publisher: Springer Publishing Company

ISSN: 1557-1955

Source: Plasmonics, Vol.6, Iss.4, 2011-12, pp. : 791-796

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Abstract